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PBT-390 On-line plasma cleaning machine

PBT-390 On-line plasma cleaning machine

  • Category:Semiconductor cleaning equipment
  • Views:0
  • Publish Time:2022-07-30
  • Product overview

The process flow:

Feed port automatic feeding - load plate reading - plasma cleaning - discharge port automatic feeding/caching.


Application field:

Suitable for all kinds of camera module, wafer precision cleaning.


Characteristics of the equipment:

? The equipment is suitable for production through connection with the customer's upper and lower work stations and automatic loading and unloading of the equipment for separate production;

? The equipment frame and shell are made of double mirror SUS304 stainless steel sheet metal to meet the requirements of grade 100 workshop;

? The operating height of the equipment is 950mm, and the adjusting height of the foot cup is 950±50mm;

? The cleaning machine is composed of a conveyor track, a reading component (reserved for MES system docking), a plasma cleaning component, and a cache horizontal group;


            

Technical parameters:

On-line plasma cleaning machine